WLA5000-MRAM

The WLA5000-MRAM Analyzer utilizes our proprietary PULSAR-8000 MRAM Pulser System along with our field-proven measurement technology and magnet expertise, integrated with a commercially available Wafer handler, provides for comprehensive MRAM device analysis.

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As MRAM development progresses and major companies see it as a potential replacement technology for DRAM and NAND, the characterization of STT, SOT, and other MRAM devices at wafer level becomes more and more critical.  Combining our WLA5000 Wafer Analyzer with our revolutionary PULSAR-8000 Pulser System, ISI's WLA5000-MRAM system is ideally suited for this task.

While many MRAM development centers may have their own experimental test setups consisting of various off the shelf instruments, released in 2009 ISI was the first and only to develop a fully integrated solution addressing the needs of production level testing of MRAM wafers.  The PULSAR-8000 is the most advanced turnkey MRAM measurement system available today.

Our proprietary magnet portfolio includes a vast array of user-interchangeable electromagnets, ideally suited for inplane, perpendicular, 3-axis, and high-field applications.  All of our magnet configurations are designed with high-performance in mind, in producing low remanent fields, high magnetic field strengths, and large uniformity volumes across the area under test.

The PULSAR-8000 is optimally matched with our proprietary probecard interface to produce programmable pulses as low as 500pS, with in-situ ability to rapidly perform measurements on the MTJs within microseconds after pulsing.  For applications where higher throughput is desired, the PULSAR-8000 can be equipped with multiple channels, providing parallel measurement capability.  An optional RF probecard interface is also available for applications demanding pulsing and measurement operations beyond 1Ghz.

In an MRAM production environment the WLA5000 MRAM Analyzer offers high throughput device performance verification as well as feedback to Wafer Process control. Options like Magnet configurations, probecards, and Thermal Chucks allow customers to customize the system to their specific needs.

The WLA5000 MRAM Analyzer can be integrated with a variety of industry standard Automated Wafer Probers to characterize magnetic properties of finished devices or test structures, under hot or cold environmental conditions.  Our proprietary software supports a full array of engineering and production interfaces, data logging, grading, and normalization, and allows for customers to develop their own software modules.

Overview

Key Benefits

  • High Field Strength Quad-Pole InPlane or Perpendicular Magnet Configuration

  • Low Remanent Field

  • High Performance Electronics

  • Contacts grounded during probing

  • Programmable diode clamping levels

  • MRAM Specific Test Suite Modules

  • Open architecture software allowing custom module design using VB.NET

  • Direct data output to various popular formats, including Microsoft Excel™  and CSV

  • Engineering/production access modes

  • Intuitive user interface

  • Vision system used for Probe monitoring

  • Interfaces with a wide array of commercial 200mm and 300mm Probers, including Electroglas, Accretech, and TEL.

  • Optional 4-color Light Tower

  • Optional Thermal Chuck

  • Optional Multi-channel Pulser for increased throughput

  • I-V and R-V Curves

  • Breakdown Voltage

  • Transfer Curve with variable sweep rate

  • Switching Currents vs. Pulse Widths

  • Endurance Testing

  • Switching Probability vs. Applied Voltage

  • Low/High State R-V Distribution

  • Read Disturb Error Rate Testing

  • Field Write Probability

  • Voltage Back Hopping

  • Sweeping Field Angle

Available Tests